TDK offers miniaturized, highly sensitive MEMS pressure sensor element

TDK Corporation (TSE:6762) presents the new C35 type pressure sensor element, designed to measure a range of 0 to 100 mbar. It combines high sensitivity with extremely low dimensions of just 2.05 x 2.05 x 1.2 mm, enabling compact pressure sensor designs.

The pressure sensor element with ordering code B58601E35* works according to the piezoresistive principle via a Wheatstone bridge and is certified for an operating voltage of up to 10 V. Offering a high sensitivity of 110 mV/V/bar, C35 is well suited for applications with high demands of sensitivity, accuracy and long-term stability of 0.1% FSON. Furthermore, C35 is designed for a wide temperature range from -40 °C to +150 °C and is suitable for pressure measurements of non-aggressive gases and liquids. The main uses are in applications that require high reliability and extremely precise pressure measurement, such as medical engineering and the industrial and automotive sectors.

Main fields of application

Pressure measurement in demanding applications such as medical engineering as well as in the industrial and automotive sectors

Main features and benefits

• Measuring range of 0 to 100 mbar
• High sensitivity of 110 mV/V/bar
• High long-term stability (LTSV0) of 0.1% FSON
• Extremely low dimensions of just 2.05 x 2.05 x 1.2 mm
• Wide temperature range of -40 °C to +150 °C