Numerous high-end solutions use piezo actuators with High Active Stack (HAS) technology from TDK, for example in nano-positioning, valve controls for liquids and gasses in process engineering, and in semiconductor manufacturing. Based on copper inner electrodes in multilayer piezo actuators – this patented technology by TDK has been used in fuel injection systems in automotive for over 20 years.
High active stacks offer superior performance, robustness to moisture, and a longer lifetime, even in harsh conditions, compared to conventional silver-palladium (AgPd) stacks.