2D piezo MEMS µ‑mirror

The new 2D piezo-based MEMS µ‑mirror results from TDK’s extensive experience in actuation and sensing technology, offering cutting-edge technology for laser beam scanning systems (LBS). The 2D piezo MEMS µ‑mirror offers the best solution for augmented reality and other projection applications in terms of the most compact footprint, lowest power consumption, huge field of view (FOV), high resolution, and reliability on the market.

Learn more about this outstanding technology and the applications that can be achieved with it.

Actuation principle of a piezo-electric mirror

Motion

The piezo-electric (lead zirconate titanate, PZT) thin film deforms an actuation ring. This ring movement leads to a mechanical motion of the reflective area in the center of the mirror. A laser beam is focused on this mirror area and gets deflected due to this movement.

Function

By generating a deflection of a laser beam in two orthogonal directions due to the rotation around two sets of torsional beams an image can be projected on a surface.

Advantages of MEMS µ‑mirrors scanning

Conventional 1D projection systems with two separate mirrors feature one fast-moving and one slow-moving mirror.

A projection with TDK’s MEMS µ‑mirror only needs one 2D mirror. The two resonant high-frequency axes lead to a very compact projection module with a Lissajous scan pattern and excellent image quality, especially for fast-moving objects.

Lissajous scanning provides key advantages over raster scanning:

Reduced complexity, size, and power consumption of the MEMS mirror
Higher FOV in the vertical axis
Higher refresh rate
Better perceived quality of the image (assuming that optimal scanning patterns are selected)
Good fill rate at the edges of the FOV
High system-level yield (multiple solutions for frequency ratios)

Overview of MEMS µ-mirror-based projection system

These building blocks show the main components of a projection system including the picture-forming unit (MEMS µ‑mirror) from TDK:

Figure 1:

AR-HUD

Figure 2:

AR/VR Smart Glasses

TDK’s MEMS µ‑mirror characteristics

Discover MEMS µ‑mirror current specification range ① and future development targets ②:

Optics

Field of view

Up to 32° (horizontal),
up to 32° (vertical)
Up to 66° (horizontal),
up to 44° (vertical)

Frame rate

Up to 60 Hz
Up to 120 Hz

Reflectivity (visible light)

> 91%
> 98%

Sensing

Integrated

Scanning

Scanning type

Lissajous scanning

Resonance frequency

37 kHz (horizontal),
17 kHz (vertical)
30 - 39 kHz (horizontal),
17 - 20 kHz (vertical)

Static deformation

Better than a radius of 2.4 ‑ 5 m
Better than a radius of 10 m

Dynamic deformation

Amplitude < 300 - 600 nm
< 300 nm

Dimensions

Mirror diameter

1.5 - 1.7 mm
1.4 - 1.8 mm

Die size

8.5 x 7.8 mm
7 x 5.5 - 9.5 x 7.7 mm

Image resolution

Full HD (1.920 x 1.080)
Up to 8K

Packaging

No packaging
Low-pressure atmosphere

Power

Actuation voltage AC

<10 V

Power consumption

Max. 90 mW*
Max. 30 mW*

* With recuperation of reactive power by appropriate recovery strategy

Development kit

Discover the potential and literally “see” the benefits of our MEMS µ‑mirror with the development kit.

Contents:

TDK MEMS µ‑mirror mounted on a testing PCB
TDK MEMS µ‑mirror driver
STM programmer
Adapter PCB
USB to UART adapter
USB stick including documentation, applications, firmware binary, and datasheets
STDC14 cortex ribbon cable for the STM programmer
Extension cable for extending the mounting range of the MEMS µ‑mirror

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TDK – your reliable partner

Expertise

In-house production including a MEMS process at FB

Technology
TDK develops customer-specific MEMS µ‑mirrors for the automotive and wearable industries.

Production
In-house production including a MEMS process at the TDK foundry. These customer-specific developed MEMS µ‑mirror designs were produced and manufactured directly in the same plant in Europe.

Engineering
TDK has a team of engineers optimizing your design and bringing out the best projection solution. In addition, TDK offers design rules for optimized design.

Quality from Europe

TDK is a market leader in passive components utilizing also semiconductor production processes in its foundry for next-generation products such as the MEMS µ‑mirror.

Everything from one hand, tested, verified, and released for further steps, produced and developed in the heart of Europe.

Get in contact

Are you interested in solutions with MEMS µ‑mirror?

TDK’s expert Keyvan Ghanaviztchi will be glad to help you.

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